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SK enpulse

A leader in localizing semiconductor parts Solmics

Total Solution Provider

Business introduction

Business introduction

  • 메인으로
  • Business introduction
  • Semiconductor Parts

Business

사업소개 이미지

We are leading the localization of the fine ceramic industry through our more than 30 years' experience in processing technologies and research and development and producing high-purity silicon, quartz, Al2O3, and SiC materials.
With our unparalleled technologies and expertise, we produce products suited for the semiconductor process environment and
provide services tailored to customers.

Core Technologies and Competitiveness

  • Possesses outstanding quality and price competitiveness with the batch production system from Si-Ingot growing to the
    finished product
  • Holds quartz product processing techniques appropriate for the properties of etch ring and diffusion ware
  • Possesses ceramic CIP, slip, and gel casting molding techniques as well as the biggest gas chamber (6.3m3) in Korea
  • Pioneer in the production of RBSC materials in Korea, the only manufacturer of large-scale SiC structures in Korea

Major Products

Fine Ceramics 주요제품의 재질, 사진, 주요특성
Material Product Photo Key Features
Si Si 이미지 Silicon for semiconductor processing is ultra-high-purity single-crystal silicon
with minimal physical and mechanical changes due to temperature
variations, with resistivity controlled by adjusting the amount of dopant added.
Quartz Quartz 이미지 High-purity SiO2 with high electric insulation and heat resistance properties
Al2O3 Al<sub>2</sub>O<sub>3</sub> 이미지 Outstanding wear resistance and heat resistance due to high precision
and hardness
Excellent chemical resistance, insulation resistance, and strength
SiC Al<sub>2</sub>O<sub>3</sub> 이미지 Superb strength, high-temperature stability, and thermal conductivity
Additional expansion of impurities prevented with CVD coating; increases
corrosion resistance
Fine Ceramics 주요제품의 Process, Parts, Material
Process Parts Material
Etch Focus / Edge Ring Si, SiC, Quartz, Al2O3, Y2O3
Inner Cel Si
Outer Cel, GND Ring Si(Multi)
Diffusion Boat, Tube SiC
THIN FILM MOER Ring, Dep Ring, Blade Al2O3, TiO2
Others Dome, Shaft, Plate, Nozzle Quartz, Al2O3